| Molecular Pump | 6 sets of molecular pump |
| Slide Valve Pump | 2 sets of 150L/S, 4 brands available for choice |
| Roots Pump | 1 set ZJP-1200 model |
| Coating System | E-Beam: E240 model. 240mm diameter crucible (5+1 acupoints), jog rotation, automatic reciprocating slow rotation, with position display |
| Ion Source | One set of Hall ion source (including the source and control power supply) |
| Thickness Meter | 310 crystal-controlled with a single control head |
| PLC | Mitsubishi |
| Vacuum Pressure | From atmosphere to 5*10⁻²Pa ≤ 6 minutes (no load, dry, clean room) |
| Chamber Size | φ2100*1650mm (other sizes: φ1600*1600mm, 600*800mm etc.) |
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