| Fixture System | Rotating umbrella frames with single or split configuration |
| Heating System | Halogen lamp/armored heater with temperature up to 350℃ |
| Exhaust System | Low vacuum pump set + high vacuum pump set + cryogenic pump/Polycold |
| Vacuum Control | Vacuum controller with Panning and Pirani vacuum gauges |
| Coating System | Electron gun, oxygen-free copper crucible, impedance evaporation source, RF/Kaufman/Hall type ion source |
| Inflation System | MFC or APC automatic pressure controller |
| Film Thickness Control | Crystal controlled or light controlled monitoring |
| Control System | PC + PLC integrated automation |
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