| Component | Specifications |
|---|---|
| Fixture System | Rotating umbrella frames on center, single or split configuration |
| Heating System | Halogen lamp/armored heater, up to 350℃ |
| Exhaust System | Low vacuum pump set + high vacuum pump set + cryogenic pump/Polycold |
| Vacuum Control | Vacuum controller, Panning and Pirani vacuum gauges |
| Coating System | Electron gun, oxygen-free copper crucible, impedance evaporation source, RF/Kaufman/Hall type ion source |
| Inflation System | MFC or APC automatic pressure controller |
| Film Thickness Control | Crystal controlled or light controlled |
| Control System | PC + PLC integration |
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