| Model | VPD 1616 S | VPD 1618 S | VPD 1420 S |
|---|---|---|---|
| Dimension | 1600×700×1600 mm | 1600×700×1800 mm | 1400×620×2000 mm |
| Material | SUS304 stainless steel or carbon steel | ||
| Vacuum System | Diffusion pump + Roots pump + Mechanical pump (3.0×10-4 Pa) | ||
| Working Cycle | Public rotation frequency control: 0-20 rotations per minute | ||
| Process Power | Imported MF power supply | ||
| Cooling System | POLY cold unit (reaching under 130°C) | ||
| Control System | PLC and one touch screen | ||
| Remark | All can be designed according to customer's request | ||
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