Small electron beam evaporation coating machines for Optical coating pvd coating equipment

The core functions of the small electron beam evaporation coating machine revolve around the deposition of high-purity and highly controllable films, which can be specifically classified into the following categories:

• High-energy electron beams are used to bombard the surface of the target material, heating it to a molten or evaporated state, and the atoms/molecules of the target material escape in gaseous form. Compared with resistance heating, electron beam heating features concentrated energy and high thermal efficiency, enabling the evaporation of refractory materials such as tungsten, molybdenum, titanium, SiO₂, and TiO₂, and avoiding contamination of the target material by the heating source.
• Supports multi-target material switching (usually equipped with 2 to 6 crucible positions), enabling continuous deposition of single-layer and multi-layer films, and meeting the preparation requirements of composite film layers.

• It is equipped with a built-in quartz crystal film thickness monitor, which can monitor the deposition rate and thickness of the film layer in real time. The control accuracy can reach the nanometer level (usually ±0.1nm), and it can prepare ultra-thin functional films (such as optical anti-reflection films and metal conductive films of tens of nanometers).
• Equipped with a programmable control system, it can preset deposition parameters (electron beam power, vacuum degree, deposition rate), achieving automated coating and ensuring the consistency of batch film layers.

• Equipped with a mechanical pump + molecular pump vacuum unit, the vacuum degree of the cavity can be reduced to a high vacuum environment of 10⁻⁴~10⁻⁶ Pa, reducing the scattering and contamination of gas molecules on evaporated particles, and ensuring that the film layer has high purity, good density and strong adhesion.

• Designed for small workpieces, the workpiece table is mostly rotary (to improve the uniformity of the coating layer), suitable for substrates with sizes typically ranging from a few millimeters to tens of millimeters (such as wafers, optical lenses, chips, sensor components), and supports coating of surface mount, sheet, and small parts.

The small electron beam evaporation coating machine, due to its compact size, flexible operation and high precision, is mainly applied in scientific research experiments and the production of small-batch high-precision and advanced products. The specific scenarios are as follows:

• New material research and development: It is used to prepare metal films (Au, Ag, Cu), dielectric films (SiO₂, TiO₂, Al₂O₃), semiconductor films (Si, Ge), etc., and to study the structure, performance and application potential of the film layers.
• Thin film physics/chemistry experiments: Conducting fundamental research on thin film growth mechanisms, interfacial reactions, doping modification, etc., it is a commonly used experimental device in disciplines such as materials science, optics, and electronics.

• Chip and sensor preparation: Deposit metal electrode films or insulating dielectric films for micro-sensors (such as pressure sensors, gas sensors) and microelectronic components (such as integrated circuit electrodes, thin-film resistors).
• Wafer-level coating: Local coating of small-sized wafers for laboratory-level chip prototype development.

• Small optical lens coating: Prepare anti-reflection films, reflective films, and beam splitting films for small optical components such as microscope objectives, laser lenses, and optical fiber end faces to enhance optical performance.
• Research and development of special optical films: Develop narrowband filters, high-reflectivity mirrors and other special film layers for the production of experimental prototypes of laser equipment and optical instruments.

• Battery material research: Depositing protective layers or conductive films for electrode materials of lithium-ion batteries and solid-state batteries to optimize the cycle life and safety of batteries.
• Solar cell research and development: Prepare anti-reflection films and electrode films for solar cells, which are used for performance testing of small-sized cells in the laboratory.

• Micro-medical device coating: Depositing biocompatible films (such as TiN, diamond-like carbon films) for implantable micro-devices (such as pacemaker electrodes, micro-probes) to enhance corrosion resistance and biological safety.
• Precision tool/mold coating: Deposit hard and wear-resistant films on small precision tools and micro molds to extend their service life (for small-batch customized production).

• Depositing structural films and functional films for MEMS devices (such as micro-motors and micro gyroscopes) to achieve miniaturization and high performance of the devices is a key equipment in the research and development of MEMS prototypes.