The rotary sputter cathode has many advantages compared with planar sputter cathode, such like:
Higher utilization rate of target material
Higher applicable sputter power and increasing of sputter rates
Stability working in AC power supply (less arcing and poisoning)
Flexibility in target materials including metal, metal oxide and ceramic targets
Therefore the dual rotary cathode is the best selection of Low-E glass magnetron sputtering line for oxide and semi-conductive layers.
Lion King can design and manufacture the dual rotary sputter cathode for our customers. There are ten sets of Low-E coating machine had equipped with Goldstone’s rotatable cathodes for the past 22 years
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