| Ultimate Vacuum Degree | Better than 8×10⁻⁴Pa (no load, dry, clean room) |
| Pumping Time | From atmosphere to 5×10⁻²Pa ≤ 6 minutes (no load, dry, clean room) |
| Diffusion Pump | KT-800 convex cavity high vacuum oil diffusion pump, pumping speed 32000L/S, stainless steel pump core with high vacuum pumping speed and low oil return rate; equipped with independent anti-oil return cold trap (2 sets) |
| Resistive Heater | Resistive wire heater for diffusion pump, designed for easy fixing and maintenance (2 sets) |
| Roots Pump | ZJP-1200 roots pump with pumping speed of 1200L/S; power: 7.5KW; low vibration, high vacuum degree, stable performance and durable quality; equipped with frequency converter to increase pumping speed (1 set) |
| Slide Valve Pump | H-150 slide valve pump |
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